簡單介紹：
此款空間光調(diào)制器SLM（Spatial light modulator）可應(yīng)用于任何需要對光束進(jìn)行連續(xù)調(diào)制的場合。其應(yīng)用之一是用于優(yōu)異光刻掩膜板。
詳情介紹：
空間光調(diào)制器SLM的特點(diǎn)：此款空間光調(diào)制器SLM（Spatial light modulator）可應(yīng)用于任何需要對光束進(jìn)行連續(xù)調(diào)制的場合。其應(yīng)用之一是用于優(yōu)異光刻掩膜板。
Data of one-megapixel SLM （1M像素空間光調(diào)制器SLM指標(biāo)如下）：
Parameter                        Value                                  Remark
Matrix size                       2048 × 512 mirrors
Pixel size                          16 × 16 μm²
Frame rate                       2 kHz
Mirror edge deflection        0 - 180 nm                          up to 350 nm possible
Wavelength                      248 nm                              up to ca. 1500 nm possible
Average beam power         40 mW                               elevated power possible; wavelength dependent
Data voltage                     0 - 25.5 V                           analogue
Data inputs                       256

此款空間光調(diào)制器SLM采用微光機(jī)電系統(tǒng)構(gòu)成，詳細(xì)的說明請參考如下：
The devices are so called MOEMS (Micro Opto Electro Mechanical System). Micromirrors are fabricated with a pitch of >10 μm using thin film technology on top of a planarized CMOS backplane. The circuit provides electrodes underneath the mirrors to supply each mirror with individual voltages. The voltage difference between the electrode and the mirror generates an electrostatic force that deflects the mirror towards the electrode. The mirror material is a highly reflective aluminium alloy. Mirrors made from alternative materials and coatings for high reflectivity for very demanding applications are available or under development.

Important Notice

Performance figures, data and any illustrative material provided in this data sheet are typical and must be specifically confirmed in writing by F-tone Networks before they become applicable to any particular order or contract. In accordance with the F-tone Networks policy of continuous improvement specifications may change without notice.

The publication of information in this data sheet does not imply freedom from patent or other protective rights of F-tone Networks or others. Further details are available from any F-tone Networks sales representative.